화학공학 Micro-Scale Patterns(영문)

화학공학 Micro-Scale Patterns(영문)

[화학공학] Micro-Scale Patterns(영문).pptx

목차 Objective Introduction & Background Apparatus, Reagents Procedure 본문 Understand Principles of micro-scale patterning process Experiment Display devices and MEMS, Developing micro-channel MEMS (Micro-Electro-Mechanical Systems) Technology of very small mechanical devices What for, MEMS ? Chemistry, Biology, Medical Science, Mechanics, Electronics Why, Lab-On-a-Chip ? Several Lab functions on a single chip very Small size Cheap Mass production just small Amount of Solution Rapid Analysis 참고문헌 Marc J. Madou "Fundamentals of MICROFABICATION," 2nd edition J. D. Lee "Silicon Integrated Circuit micro-fabrication-technology," 2nd edition R. C. Jaeger "Introduction to Microelectronic Fabrication," 2nd edition www.isrc.snu.ac.kr 키워드 화학공학, Scale, Micro, MicroScale, Patterns